Keywords
100 mm diameter
Czochralski technique
EPD
heating unit
homogeneity
indium antimonide
single crystal
technology
Abstract
Currently there is a worldwide trend to increase the diameter of crystals grown from elemental semiconductors and semiconductor compounds. According to literary data the diameter of 3–5 semiconductor single crystals grown nowadays is 4 to 6 inches. So far up to 75 mm indium antimonide single crystals have been grown in Russia.
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