Keywords
annealing
doping
electrophysical properties
neutron irradiation
nuclear reactions
radiation defects
semiconductors
silicon single crystals
Abstract
Review on the book Kharchenko V. A., Smirnov L. S., Solov’ev S. P., Stas’ V. F. Nuclear Doping of Semiconductor Materials (second edition, revised). Executive Editor, Dr. Sci. (Engineering) V.A. Kharchenko
References
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Smirnov L.S., Solov’ev S.P., Stas’ V.F., Kharchenko V.A. Doping of semiconductors by nuclear reaction method. Novosibirsk: Nauka, 1981, 182 pp. [In Russ.]
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Kharchenko V.A., Soloviev S.P. Radiation doping of silicon. Fizika i tekhnika poluprovodnikov 1971 5(8): 1641–1643. [In Russ.]