Keywords
adaptive X-ray optics
quick extended X-ray absorption spectroscopy (qEXAFS)
synchrotron studies
X-ray spectroscopy
Abstract
Based on previously proposed approaches for implementing monochromatic X-ray beam rapid spectra modulation method using adaptive X-ray optical elements, a new spatially resolved technique has been developed. This technique was applied to record the tantalum L3 edge absorption spectra linear distribution with 37 µm spatial resolution. This method accelerates the sample's structure study rate by increasing the illuminated area compared to the classical X-ray absorption spectroscopy method and increasing the volume of information obtained relative to X-ray fluorescence. This approach is promising for studying crystalline materials with complex structure used in the microelectronics industry.
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