Synthesis of silicon-carbon films by induction-assisted plasma-chemical deposition
Alexander A. Temirov, Ilya V. Kubasov, Andrei V. Turutin, Tatiana S. Ilina, Alexander M. Kislyuk, Dmitry A. Kiselev, Elena A. Skryleva, Nikolai A. Sobolev, Igor A. Salimon, Nikolai V. Batrameev, Mikhail D. Malinkovich, Yuri N. Parkhomenko
Volume 9, Issue 4, 177-184
Communication , 12 December 2023